Rare event training data sets for robust training of semiconductor yield related components

Abstract

Methods and systems for determining information for a specimen are provided. One method includes collecting images of known rare defect types previously detected on one or more other specimens and assigning training labels to the images responsive to the known rare defect types in the images. The method also includes storing the collected images and the assigned training labels as a rare defect type training data set. The rare defect type training data set is unsuitable for use in training a component configured for determining information for the specimen from runtime images generated for the specimen by an imaging system until the rare defect type training data set is combined with training images and corresponding training labels generated for the specimen. The method may also or alternatively perform these steps for known tool excursion events previously detected on one or more additional specimens.