The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2025
Filed:
Nov. 14, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Nedal Saleh, San Jose, CA (US);
Zhiming Jiang, Pleasanton, CA (US);
Xiaodong Zhang, Sunnyvale, CA (US);
Arun Ramaswamy Srivatsa, Fremont, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/31 (2006.01); G01N 21/3563 (2014.01);
U.S. Cl.
CPC ...
G01N 21/3103 (2013.01); G01N 21/3563 (2013.01); G01N 2021/3568 (2013.01); G01N 2201/126 (2013.01);
Abstract
The methods and apparatus provide phase-resolved optical metrology for determining qualities of a substrate and films thereon. Transmitted and reflected signals are coupled using both amplitude and phase information to improve the metrology information obtained from film layers on the substrate.