The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2025
Filed:
Jul. 28, 2022
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Kai-Fang Cheng, Hsinchu, TW;
Hsiao-Kang Chang, Hsinchu, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
Abstract
A semiconductor structure includes a base structure, a plurality of electrically conductive features disposed on the base structure, and an isolation structure disposed on the base structure. The base structure includes a substrate. The electrically conductive features are spaced apart from each other. The isolation structure includes a first inter-metal dielectric feature extending horizontally to interconnect the electrically conductive features, a first air gap layer disposed in the isolation structure and around the electrically conductive features, and a first sustaining feature extending horizontally to interconnect the electrically conductive features and disposed between the first inter-metal dielectric feature and the first air gap layer. Methods for manufacturing the semiconductor structure are also disclosed.