The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2025
Filed:
Sep. 19, 2023
Applied Materials, Inc., Santa Clara, CA (US);
Laksheswar Kalita, Milpitas, CA (US);
Nitin K. Ingle, San Jose, CA (US);
Nilesh Mistry, Hayward, CA (US);
Jonathan J. Strahle, San Francisco, CA (US);
Christopher L. Beaudry, San Jose, CA (US);
Lok Kee Loh, San Francisco, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Exemplary methods for a coating a component of a semiconductor processing system may include forming a nickel-containing alloy on an exposed surface the component of the semiconductor processing system. The methods may include forming plasma effluents of a fluorine-containing precursor. The methods may include contacting the nickel-containing alloy with the plasma effluents of the fluorine-containing precursor. The contacting may fluorinate a portion of the nickel-containing alloy to form a nickel-and-fluorine-containing material overlying the nickel-containing alloy.