Laksheswar Kalita

Title: Laksheswar Kalita: Innovator in Semiconductor Technology

Introduction

Laksheswar Kalita is a prominent inventor based in Milpitas, CA (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on advanced coating techniques and components for semiconductor processing systems.

Latest Patents

Kalita's latest patents include innovative methods for semiconductor chamber components. One of his notable patents is titled "Semiconductor chamber components with advanced dual layer nickel-containing coatings." This patent describes exemplary methods for coating a component of a semiconductor processing system, which involves forming a nickel-containing alloy on an exposed surface. The methods also include forming plasma effluents of a fluorine-containing precursor and fluorinating a portion of the nickel-containing alloy to create a nickel-and-fluorine-containing material.

Another significant patent is "Semiconductor chamber components with advanced coating techniques." This technology is directed towards semiconductor processing systems and methods. It describes a chamber that includes various components such as a pedestal, a lid stack, a faceplate, an electrode, and a showerhead. The faceplate supports the lid stack and defines multiple first apertures, while the showerhead is positioned between the faceplate and the pedestal, defining several second apertures. The systems and methods involve coatings of yttrium fluoride, yttrium oxyfluoride, or both, with a thickness greater than 10 μm on at least a portion of the respective chamber components.

Career Highlights

Kalita is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work at Applied Materials has allowed him to develop and refine his innovative ideas, contributing to advancements in semiconductor processing technologies.

Collaborations

Throughout his career, Kalita has collaborated with notable colleagues, including Christopher L Beaudry and Jonathan J Strahle. These collaborations have fostered a creative environment that encourages the development of cutting-edge technologies in the semiconductor field.

Conclusion

Laksheswar Kalita is a distinguished inventor whose work in semiconductor technology has led to multiple patents and significant advancements in the industry. His contributions continue to shape the future of semiconductor processing systems.