The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2025
Filed:
Aug. 06, 2020
Applicant:
Nissan Chemical Industries, Ltd., Tokyo, JP;
Inventors:
Keisuke Hashimoto, Toyama, JP;
Kenji Takase, Toyama, JP;
Tetsuya Shinjo, Toyama, JP;
Rikimaru Sakamoto, Toyama, JP;
Takafumi Endo, Toyama, JP;
Hirokazu Nishimaki, Toyama, JP;
Assignee:
NISSAN CHEMICAL INDUSTRIES, LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/11 (2006.01); C07C 39/10 (2006.01); C07C 43/178 (2006.01); C08G 12/08 (2006.01); C09D 161/06 (2006.01); C09D 161/22 (2006.01); G03F 7/09 (2006.01); G03F 7/40 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
G03F 7/11 (2013.01); C07C 39/10 (2013.01); C07C 43/1785 (2013.01); C08G 12/08 (2013.01); C09D 161/06 (2013.01); C09D 161/22 (2013.01); G03F 7/091 (2013.01); G03F 7/094 (2013.01); G03F 7/40 (2013.01); H01L 21/31138 (2013.01); H01L 21/31144 (2013.01);
Abstract
A resist underlayer film-forming composition includes a resin; and a crosslinkable compound of Formula (1) or Formula (2): wherein the crosslinkable compound of Formula (1) or Formula (2) is a compound obtained by reacting a compound of Formula (3) or Formula (4): with an ether compound comprising a hydroxy group or a Calcohol.