The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2025
Filed:
Jan. 21, 2021
Asml Holding N.v., Veldhoven, NL;
Peter Conrad Kochersperger, Easton, CT (US);
Christopher Michael Dohan, Redding, CT (US);
Justin Lloyd Kreuzer, Trumbull, CT (US);
Michal Emanuel Pawlowski, Norwalk, CT (US);
Aage Bendiksen, Fairfield, CT (US);
Kirill Urievich Sobolev, Brookfield, CT (US);
James Hamilton Walsh, Newtown, CT (US);
Roberto B. Wiener, Ridgefield, CT (US);
Arun Mahadevan Venkataraman, Wilton, CT (US);
ASML Holding N.V., Veldhoven, NL;
Abstract
An inspection system includes a radiation source that generates a beam of radiation and irradiates a first surface of an object, defining a region of the first surface of the object. The radiation source also irradiates a second surface of the object, defining a region of the second surface, wherein the second surface is at a different depth level within the object than the first surface. The inspection system may also include a detector that defines a field of view (FOV) of the first surface including the region of the first surface, and receives radiation scattered from the region of the first surface and the region of the second surface. The inspection system may also include a processor that discards image data not received from the region of the first surface, and constructs a composite image comprising the image data from across the region of the first surface.