The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2025
Filed:
Mar. 29, 2021
Applicant:
Fujifilm Electronic Materials U.s.a., Inc., N. Kingstown, RI (US);
Inventors:
James Mcdonough, Gilbert, AZ (US);
Ting-Kai Huang, Tainan, TW;
Yannan Liang, Gilbert, AZ (US);
Shu-Wei Chang, Taoyuan, TW;
Sung Tsai Lin, Taoyuan, TW;
Liqing Wen, Mesa, AZ (US);
Assignee:
Fujifilm Electronic Materials U.S.A., Inc., N. Kingstown, RI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 3/28 (2006.01); C09G 1/02 (2006.01); C11D 1/34 (2006.01); C11D 3/14 (2006.01); C11D 3/20 (2006.01); C11D 3/34 (2006.01); C11D 3/36 (2006.01); C23F 11/167 (2006.01); H01L 21/321 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); C11D 1/345 (2013.01); C11D 3/14 (2013.01); C11D 3/2075 (2013.01); C11D 3/2079 (2013.01); C11D 3/2082 (2013.01); C11D 3/2086 (2013.01); C11D 3/28 (2013.01); C11D 3/361 (2013.01); C11D 3/362 (2013.01); C23F 11/1676 (2013.01); H01L 21/3212 (2013.01);
Abstract
This disclosure features a polishing composition that includes at least one abrasive; at least one first corrosion inhibitor that includes a phosphate or a phosphonate group; at least one complexing agent; at least one second corrosion inhibitor that is at least one azole compound; and optionally a pH adjuster.