The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2025
Filed:
Aug. 19, 2022
Asml Netherlands B.v., Veldhoven, NL;
Arjen Benjamin Storm, Delft, NL;
Johan Frederik Cornelis Van Gurp, Berkel en Rodenrijs, NL;
Henri Kristian Ervasti, The Hague, NL;
Aaron Yang-Fay Ayal, Roosendaal, NL;
Stijn Wilem Herman Karel Steenbrink, The Hague, NL;
Marco Jan-Jaco Wieland, Delft, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Disclosed herein is an electron-optical assembly testing system for testing an electron-optical assembly, the system comprising: a source of charged particles configured to emit a beam of charged particles; an electron-optical assembly holder configured to hold an electron-optical assembly to be tested such that, when the system is in use with an electron-optical assembly held by the electron-optical assembly holder, the electron-optical assembly is illuminated by the beam; and a sub-beam detector for detecting sub-beams of charged particles that have been transmitted through the electron-optical assembly.