The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 05, 2025

Filed:

Sep. 19, 2023
Applicant:

Hefei University of Technology, Anhui, CN;

Inventors:

Huining Zhao, Anhui, CN;

Xiaoying Hou, Anhui, CN;

Jie Wang, Anhui, CN;

Liandong Yu, Anhui, CN;

Haojie Xia, Anhui, CN;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/24 (2006.01); G01B 9/0209 (2022.01); G01N 21/954 (2006.01);
U.S. Cl.
CPC ...
G01B 11/2441 (2013.01); G01B 9/0209 (2013.01); G01N 21/954 (2013.01);
Abstract

A measurement system for detecting deep-hole surface topography based on low-coherence interferometry (LCI) can include a detection part and an autocollimation system. The detection part includes a white light interferometric system, which specifically includes a 1550 nm amplified spontaneous emission (ASE) broadband light source, a first reflector, a first beam splitting prism, a second reflector, and a reference reflector that are arranged in sequence, where a to-be-measured deep-hole and a near-infrared camera are respectively arranged at two sides of the first beam splitting prism, and a conical prism is disposed inside the to-be-measured deep-hole. The autocollimation system is disposed between the to-be-measured deep-hole and the first beam-splitting prism. The autocollimation system includes a 630 nm light source, a dichroic prism, a second beam-splitting prism, a third reflector, and a quadrant detector that are arranged in sequence.


Find Patent Forward Citations

Loading…