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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12374519 B1

PDFFull Text
Date of Patent:
Jul. 29, 2025

Filed:

Aug. 27, 2021

Wafer positioning method and apparatus

Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Chia-Cheng Chen, Hsinchu, TW;

Chun-Liang Chen, Hsinchu, TW;

Liang-Yin Chen, Hsinchu, TW;

Huicheng Chang, Tainan, TW;

Yee-Chia Yeo, Hsinchu, TW;

Assignee:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Attorney:

Slater Matsil, LLP

Primary Examiner:

Shaun M Campbell

Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01J 37/20 (2006.01); H01J 37/22 (2006.01); H01J 37/304 (2006.01); H01J 37/317 (2006.01); H01L 21/265 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); H01J 37/22 (2013.01); H01J 37/3045 (2013.01); H01J 37/3171 (2013.01); H01L 21/265 (2013.01); H01L 22/20 (2013.01); H01J 2237/20214 (2013.01); H01J 2237/30438 (2013.01);
Abstract

In an embodiment, a method includes: placing a wafer on an implanter platen, the wafer including integrated circuit dies; measuring a position of the wafer by measuring a position of an outer edge of the integrated circuit dies with a camera; determining an angular displacement between the position of the wafer and a reference position of the wafer; and rotating the implanter platen by the angular displacement.

Find Patent Forward Citations

Chen, Chia-Cheng. (2025). Wafer positioning method and apparatus (U.S. Patent No. 12374519). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12374519

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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