The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2025
Filed:
Jun. 22, 2023
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Markus Raab, Schillingsfuerst, DE;
Andreas Raba, Niederschoenenfeld, DE;
Mirko Buechsenschuetz, Schweinfurt, DE;
Matthias Manger, Aalen-Unterkochen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 7/185 (2021.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70316 (2013.01); G02B 7/185 (2013.01); G03F 7/70225 (2013.01);
Abstract
A projection exposure apparatus comprises an optical element. The optical element comprises a main body and an actuator for deforming an optically effective surface formed on the main body. The actuator is in a recess in the rear side of the main body.