The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 15, 2025

Filed:

Aug. 31, 2021
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Julien Frougier, Albany, NY (US);

Ruilong Xie, Niskayuna, NY (US);

Kangguo Cheng, Schenectady, NY (US);

Dimitri Houssameddine, Sunnyvale, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H10D 64/01 (2025.01); H01L 21/311 (2006.01); H01L 21/768 (2006.01); H10D 30/01 (2025.01); H10D 30/62 (2025.01); H10D 62/10 (2025.01); H10D 84/01 (2025.01); H10D 84/03 (2025.01); H10D 84/83 (2025.01);
U.S. Cl.
CPC ...
H10D 64/018 (2025.01); H01L 21/31144 (2013.01); H01L 21/76832 (2013.01); H10D 30/024 (2025.01); H10D 30/62 (2025.01); H10D 62/115 (2025.01); H10D 62/119 (2025.01); H10D 64/015 (2025.01); H10D 84/0158 (2025.01); H10D 84/038 (2025.01); H10D 84/834 (2025.01);
Abstract

A semiconductor apparatus includes a substrate; a central vertical pillar of dielectric material protruding upward from the substrate; a left plurality of semiconductor fins protruding horizontally from a left side of the central vertical pillar above the substrate; a right plurality of semiconductor fins protruding horizontally from a right side of the central vertical pillar opposite the left plurality of semiconductor fins; a gate stack surrounding the central vertical pillar and the left and right pluralities of semiconductor fins; and a bottom dielectric insulating layer protruding horizontally left and right of the central vertical pillar below the left and right pluralities of fins and adjacent to the substrate.


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