The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2025
Filed:
May. 31, 2022
Kla Corporation, Milpitas, CA (US);
Christopher D. Liman, Milpitas, CA (US);
Bindi M. Nagda, Melbourne, FL (US);
Antonio Arion Gellineau, Santa Clara, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
Methods and systems for optimizing a semiconductor measurement recipe that is robust to variations of hardware modeling parameters and geometric modeling errors are described herein. Robust measurement recipe optimization minimizes a cost function including one or more regularization terms that constrain the process space, and thus, significantly reduces the computational effort required to optimize a measurement recipe. This reduces overall process time and improves wafer throughput. In some examples, optimization is performed based on measurement data associated with multiple instances of a semiconductor structure; each instance characterized a different value of one or more geometric parameters of interest. In some examples, the search for optimized measurement recipes is limited to the discrete set of measurement system parameter values associated with the available measurement data set. In this manner, the performance of a particular measurement recipe is validated using existing measurement data.