The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 08, 2025

Filed:

Mar. 31, 2022
Applicant:

Powerchip Semiconductor Manufacturing Corporation, Hsinchu, TW;

Inventors:

Chun-Lin Lu, Hsinchu, TW;

Shou-Zen Chang, Hsinchu, TW;

Ying-Tsung Chu, Hsinchu, TW;

Ming-Hsun Tsai, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/52 (2006.01); H01L 21/66 (2006.01); H01L 23/00 (2006.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01); G01R 1/04 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 22/32 (2013.01); H01L 23/5226 (2013.01); H01L 23/5283 (2013.01); H01L 24/05 (2013.01); G01R 1/0491 (2013.01); H01L 21/76816 (2013.01); H01L 24/08 (2013.01); H01L 2224/05554 (2013.01); H01L 2224/05569 (2013.01); H01L 2224/0557 (2013.01); H01L 2224/08147 (2013.01); H01L 2924/30101 (2013.01);
Abstract

A wafer structure and a manufacturing method thereof are provided. The wafer structure includes a substrate structure, a first dielectric layer, multiple test pads, a second dielectric layer, and multiple bond pads. The first dielectric layer is disposed on the substrate structure. The test pads are disposed in and exposed outside the first dielectric layer. Each test pad has a probe mark. The second dielectric layer is disposed on the first dielectric layer. The second dielectric layer has a top surface away from the test pads. Multiple bond pads are disposed in and exposed outside the second dielectric layer. Each bond pad is electrically connected to the corresponding test pad. The bond pads have bonding surfaces away from the test pads. The bonding surfaces are flush with the top surface. In the normal direction of the substrate structure, each bond pad does not overlap the probe mark of the corresponding test pad.


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