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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12350787 B1

PDFFull Text
Date of Patent:
Jul. 08, 2025

Filed:

Jul. 05, 2023

Substrate processing apparatus

Applicant:

Ebara Corporation, Tokyo, JP;

Inventors:

Kuniaki Yamaguchi, Tokyo, JP;

Itsuki Kobata, Tokyo, JP;

Toshio Mizuno, Tokyo, JP;

Mitsuru Miyazaki, Tokyo, JP;

Naoki Toyomura, Tokyo, JP;

Takuya Inoue, Tokyo, JP;

Assignee:

EBARA CORPORATION, Tokyo, JP;

Attorney:

BakerHostetler

Primary Examiner:

Eric W Golightly

Assistant Examiner:

Ryan L Coleman

Int. Cl.
CPC ...
B24B 1/00 (2006.01); B08B 1/32 (2024.01); B08B 3/02 (2006.01); B24B 53/017 (2012.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B24B 53/017 (2013.01); B08B 1/32 (2024.01); B08B 3/02 (2013.01); H01L 21/67046 (2013.01); H01L 21/67051 (2013.01); B08B 2203/0288 (2013.01);
Abstract

An embodiment of the present invention provides a buff process module. The buff process module includes: a buff table on which a processing target object is mounted; a buff head that holds a buff pad for applying a predetermined process to the processing target object; a buff arm that supports and swings the buff head; a dresser for dressing the buff pad; and a cleaning mechanism that is disposed between the buff table and the dresser and is for cleaning the buff pad.

Find Patent Forward Citations

Yamaguchi, Kuniaki. (2025). Substrate processing apparatus (U.S. Patent No. 12350787). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12350787

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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