The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 01, 2025

Filed:

Apr. 18, 2022
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Kun-Mu Li, Zhudong Township, TW;

Liang-Yi Chen, Taipei, TW;

Wen-Chu Hsiao, Tainan, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 30/62 (2025.01); H01L 21/768 (2006.01); H10D 30/01 (2025.01); H10D 30/69 (2025.01); H10D 62/10 (2025.01); H10D 62/13 (2025.01); H10D 62/822 (2025.01); H10D 62/832 (2025.01); H10D 64/01 (2025.01); H10D 84/01 (2025.01); H10D 84/03 (2025.01);
U.S. Cl.
CPC ...
H10D 30/62 (2025.01); H10D 30/0212 (2025.01); H10D 30/024 (2025.01); H10D 30/6219 (2025.01); H10D 62/151 (2025.01); H10D 64/021 (2025.01); H10D 84/0158 (2025.01); H10D 84/0193 (2025.01); H10D 84/038 (2025.01); H01L 21/76805 (2013.01); H01L 21/76829 (2013.01); H01L 21/76897 (2013.01); H10D 30/797 (2025.01); H10D 62/115 (2025.01); H10D 62/116 (2025.01); H10D 62/121 (2025.01); H10D 62/822 (2025.01); H10D 62/832 (2025.01);
Abstract

A semiconductor device includes a gate structure formed over a channel region of the semiconductor device, a source/drain region adjacent the channel region, and an electrically conductive contact layer over the source/drain region. The source/drain region includes a first epitaxial layer having a first material composition and a second epitaxial layer formed over the first epitaxial layer. The second epitaxial layer has a second material composition different from the first composition. The electrically conductive contact layer is in contact with the first and second epitaxial layers. A bottom of the electrically conductive contact layer is located below an uppermost portion of the first epitaxial layer.


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