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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12337289 B1

PDFFull Text
Date of Patent:
Jun. 24, 2025

Filed:

Jun. 27, 2024

Chemical liquid preparation device, and substrate processing device

Applicant:

Screen Holdings Co., Ltd., Kyoto, JP;

Inventors:

Hajime Nishide, Kyoto, JP;

Takashi Izuta, Kyoto, JP;

Takatoshi Hayashi, Kyoto, JP;

Katsuhiro Fukui, Kyoto, JP;

Koichi Okamoto, Kyoto, JP;

Kazuhiro Fujita, Kyoto, JP;

Atsuyasu Miura, Kyoto, JP;

Kenji Kobayashi, Kyoto, JP;

Sei Negoro, Kyoto, JP;

Hiroki Tsujikawa, Kyoto, JP;

Assignee:

SCREEN Holdings Co., Ltd., Kyoto, JP;

Attorney:

JCIPRNET

Primary Examiner:

Elizabeth Insler

Int. Cl.
CPC ...
B01F 35/82 (2022.01); B01F 23/231 (2022.01); B01F 23/237 (2022.01); B01F 35/21 (2022.01); B01F 35/22 (2022.01); G05D 11/00 (2006.01); G05D 21/02 (2006.01); H01L 21/306 (2006.01); H01L 21/3213 (2006.01); H01L 21/67 (2006.01); B01F 101/58 (2022.01);
U.S. Cl.
CPC ...
B01F 35/82 (2022.01); B01F 23/231 (2022.01); B01F 23/237611 (2022.01); B01F 23/237612 (2022.01); B01F 23/23765 (2022.01); B01F 35/2132 (2022.01); B01F 35/2202 (2022.01); G05D 11/00 (2013.01); G05D 21/02 (2013.01); H01L 21/30608 (2013.01); H01L 21/32134 (2013.01); H01L 21/67017 (2013.01); H01L 21/67028 (2013.01); H01L 21/67051 (2013.01); H01L 21/67075 (2013.01); H01L 21/6708 (2013.01); B01F 2101/58 (2022.01);
Abstract

A chemical liquid preparation method of preparing a TMAH-containing chemical liquid, including, a correspondence relationship preparing step of preparing a correspondence relationship between a supply flow rate ratio between an oxygen-containing gas and an inert-gas-containing gas and a convergent dissolved oxygen concentration in the TMAH-containing chemical liquid that is converged to when the oxygen-containing gas and the inert-gas-containing gas are supplied into the TMAH-containing chemical liquid; a concentration setting step of setting a target dissolved oxygen concentration in the TMAH-containing chemical liquid; a supply-flow-rate-ratio acquiring step of acquiring the supply flow rate ratio between the oxygen-containing gas and the inert-gas-containing gas corresponding to the target dissolved oxygen concentration in accordance with the correspondence relationship prepared in the correspondence relationship preparing step; and a gas supplying step of supplying the oxygen-containing gas and the inert-gas-containing gas with the supply flow rate ratio acquired in the supply-flow-rate-ratio acquiring step.

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