The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2025
Filed:
Nov. 20, 2020
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Tatsuo Hatano, Nirasaki, JP;
Tetsuya Miyashita, Nirasaki, JP;
Naoki Watanabe, Nirasaki, JP;
Naoyuki Suzuki, Fuchu, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B65G 54/02 (2006.01); H02K 41/03 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67709 (2013.01); B65G 54/02 (2013.01); H01L 21/67748 (2013.01); H02K 41/031 (2013.01); H02K 2201/18 (2013.01);
Abstract
A substrate transfer device, includes: a first planar motor installed in a first chamber and having an array of coils; a second planar motor installed in a second chamber connected to the first chamber and having an array of coils; a pair of transfer units configured to move on at least one of the first planar motor and the second planar motor and configured to transfer a substrate; and a controller configured to control supply of electric current to the coils of the first planar motor and the second planar motor.