The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2025
Filed:
Mar. 27, 2022
Applicant:
Fujian Jinhua Integrated Circuit Co., Ltd., Quanzhou, CN;
Inventors:
Guoguo Kong, Quanzhou, CN;
Shi-Wei He, Quanzhou, CN;
Yun-Fan Chou, Quanzhou, CN;
Dongxiang Zhu, Quanzhou, CN;
Gang Wu, Quanzhou, CN;
Canfa Dai, Quanzhou, CN;
Jianxiong Lai, Quanzhou, CN;
Assignee:
Fujian Jinhua Integrated Circuit Co., Ltd., Quanzhou, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/52 (2006.01); H01L 23/528 (2006.01); H01L 23/535 (2006.01); H10B 41/27 (2023.01); H10B 43/27 (2023.01);
U.S. Cl.
CPC ...
H01L 23/5283 (2013.01); H01L 23/535 (2013.01); H10B 41/27 (2023.02); H10B 43/27 (2023.02);
Abstract
A three-dimensional memory device includes a staircase structure comprising steps respectively comprising a conductive layers and a dielectric layer. A sidewall of the conductive layer is recessed from a sidewall of the dielectric layer to form a recess that exposes a portion of a bottom surface of the dielectric layer.