The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2025
Filed:
Jan. 24, 2022
Globalfoundries U.s. Inc., Malta, NY (US);
Rong-Ting Liou, Malta, NY (US);
Man Gu, Malta, NY (US);
Jeffrey B. Johnson, Essex Junction, VT (US);
Wang Zheng, Ballston Lake, NY (US);
Jagar Singh, Clifton Park, NY (US);
Haiting Wang, Clifton Park, NY (US);
GlobalFoundries U.S. Inc., Malta, NY (US);
Abstract
An IC structure that includes a trench isolation (TI) in a substrate having three portions of different dielectric materials. The portions may also have different widths. The TI may include a lower portion including a first dielectric material and having a first width, a middle portion including the first dielectric material and an outer second dielectric material, and an upper portion including a third dielectric material and having a second width greater than the first width. The first, second and third dielectric materials are different.