The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2025
Filed:
Apr. 26, 2021
Asml Netherlands B.v., Veldhoven, NL;
Benjamin Andrew Sams, San Diego, CA (US);
Dietmar Uwe Herbert Trees, San Diego, CA (US);
Theodorus Wilhelmus Driessen, San Diego, CA (US);
Herman Harry Borggreve, Waalre, NL;
Brandon Michael Johnson, Escondido, CA (US);
Vikas Giridhar Telkar, Escondido, CA (US);
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A droplet generator nozzle () includes a metal body (), a metal fitting () arranged adjacent to the metal body, and a capillary () comprising a first end and a second end. The first end of the capillary is disposed within the metal fitting, and the capillary is configured to eject initial droplets of a material from the second end of the capillary. The droplet generator nozzle further includes an electromechanical element () disposed within the metal body and coupled to the first end of the capillary and a fastener element () configured to clamp around a portion of the metal body and around the metal fitting. The electromechanical element is configured to apply a change that affects droplet generation from the capillary. The second end of the capillary protrudes out from an opening in the fastener element of the droplet generator nozzle. Droplet generator nozzleof FIG.C represents the embodiment shown in FIG.B, in a cross section orthogonal to the cross section shown in FIG.B.