The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2025

Filed:

Jun. 25, 2023
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Kam-Tou Sio, Hsinchu, TW;

Chih-Liang Chen, Hsinchu, TW;

Hui-Ting Yang, Hsinchu, TW;

Shun Li Chen, Hsinchu, TW;

Ko-Bin Kao, Hsinchu, TW;

Chih-Ming Lai, Hsinchu, TW;

Ru-Gun Liu, Hsinchu, TW;

Charles Chew-Yuen Young, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/02 (2005.12); H01L 21/3213 (2005.12); H01L 21/8234 (2005.12); H01L 27/088 (2005.12); H01L 29/417 (2005.12); H01L 29/423 (2005.12); H10B 10/00 (2022.12);
U.S. Cl.
CPC ...
H01L 27/0207 (2012.12); H01L 21/32133 (2012.12); H01L 21/32139 (2012.12); H01L 21/823431 (2012.12); H01L 21/823475 (2012.12); H01L 27/0886 (2012.12); H01L 29/41791 (2012.12); H01L 29/42376 (2012.12); H01L 21/823437 (2012.12); H10B 10/12 (2023.01); H10B 10/18 (2023.01);
Abstract

A method (of manufacturing conductors for a semiconductor device) includes: forming active regions (ARs) in a first layer, the ARs extending in a first direction; forming a conductive layer over the first layer; forming first, second and third caps over the conductive layer, the caps extending in a second direction perpendicular to the first direction, and the caps having corresponding first, second and third sensitivities that are different from each other; removing portions of the conductive layer not under the first, second or third caps resulting in gate electrodes under the first caps and first and second drain/source (D/S) electrodes correspondingly under the second or third caps; and selectively removing portions of corresponding ones of the first D/S electrodes and the second D/S electrodes.


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