The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2025
Filed:
Aug. 05, 2020
Asml Netherlands B.v., Veldhoven, BE;
Imec V.z.w., Leuven, BE;
Alexandre Halbach, Leuven, BE;
Nitesh Pandey, Eindhoven, NL;
Sebastianus Adrianus Goorden, Eindhoven, NL;
Veronique Rochus, Leuven, BE;
Luc Roger Simonne Haspeslagh, Linden, BE;
Guilherme Brondani Torri, Leuven, BE;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A micromirror array includes a substrate, a plurality of mirrors for reflecting incident radiation, and for each mirror of the plurality of mirrors, a respective post connecting the substrate to the respective mirror. The micromirror array further includes, for each mirror of the plurality of mirrors, one or more electrostatic actuators connected to the substrate for applying force to the respective post to displace the respective post relative to the substrate, thereby displacing the respective mirror. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection apparatus.