The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2025
Filed:
Aug. 06, 2020
Tokyo Electron Limited, Tokyo, JP;
Yoshihiro Takezawa, Nirasaki, JP;
Daisuke Suzuki, Nirasaki, JP;
Hiroyuki Hayashi, Nirasaki, JP;
Tatsuya Miyahara, Nirasaki, JP;
Keisuke Fujita, Nirasaki, JP;
Masami Oikawa, Oshu, JP;
Sena Fujita, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A cleaning method according to an aspect of the present disclosure includes: supplying a halogen-containing gas that does not contain fluorine to an interior of a processing container that is capable of being exhausted via an exhaust pipe to perform a cleaning; and supplying a fluorine-containing gas to at least one of the interior of the processing container and an interior of the exhaust pipe to perform the cleaning after the supplying the halogen-containing gas to perform the cleaning.