The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2025
Filed:
Feb. 18, 2022
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Alexander Winkler, Heidenheim, DE;
Martin Scheid, Aalen, DE;
Hans Michael Stiepan, Aalen, DE;
Jochen Hetzler, Aalen, DE;
Frank Eisert, Aalen, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
Abstract
A diffractive optical element () for a test interferometer () measures a shape of an optical surface (). Diffractive shape measuring structures () are arranged on a used surface () of the element and generate a test wave () irradiating the surface when the element is arranged in the interferometer. At least one test field () several profile properties of test structures contained in the test field. The profile properties characterize a profile line of the test structures extending transversely with respect to the used surface and include a flank angle of the profile line, a profile depth and a depth of a microtrench in a bottom region of a trench-shaped profile of the test structures. The test field is arranged at one location of the used surface instead of the diffractive shape measuring structures such that the test field is surrounded by several diffractive shape measuring structures.