The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2025
Filed:
Feb. 22, 2022
Nxp Usa, Inc., Austin, TX (US);
Darrell Glenn Hill, Chandler, AZ (US);
Bruce McRae Green, Gilbert, AZ (US);
NXP USA, Inc., Austin, TX (US);
Abstract
An integrated circuit includes an isolation test structure (ITS) formed in a non-active region. An electrical isolation between structures of the integrated circuit may be validated based on a measured resistance or conductivity across the ITS. In some embodiments the ITS includes interdigitated buffer layer structures. In some embodiments, the ITS is arranged in series with a test Through-substrate via (TSV). The test TSV is formed with a slower etch rate and smaller diameter than other standard TSVs of the integrated circuit and can be used to validate the formation of the standard TSVs based on measured resistance or conductivity thereof. By arranging the ITS and the test TSV in series, isolation of the integrated circuit and formation of TSVs in the integrated circuit can be validated using a single measurement.