The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 14, 2025

Filed:

Jul. 22, 2022
Applicant:

Plansee Usa Llc, Franklin, MA (US);

Inventors:

Nam Ngo, Vista, CA (US);

Gerhard Duerrhammer, Vista, CA (US);

Jacob Boyer, Vista, CA (US);

Florian Schaper, Vista, CA (US);

Dustin Hacker, Vista, CA (US);

Mason Payne, Vista, CA (US);

Surf Johnson, Vista, CA (US);

Andrew Dalager, Vista, CA (US);

Assignee:

Plansee USA LLC, Franklin, MA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/08 (2006.01); H01J 1/88 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
H01J 37/08 (2013.01); H01J 1/88 (2013.01); H01J 37/3171 (2013.01); H01J 2237/061 (2013.01);
Abstract

A repeller assembly mounts in an arc chamber of an ion implanter. The repeller assembly contains a repeller, a tubular insert, first and second insulators, a contact member, and a lock member. The repeller has a knob-shaped body placed on an inner side of the arc chamber opposite to a cathode assembly. A repeller shaft is arranged extending through an opening of a wall of the arc chamber to an outer side. The repeller shaft has a step narrowing down the repeller shaft. The tubular insert is mounted concentrically to the repeller shaft. The first insulator has a collar shape and is attached to the tubular insert so that an inner shoulder of the first insulator is pressed against an outer side of the wall of the arc chamber. The second insulator is cap-nut shaped and is attached to the first insulator with an outer flange thereof.


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