The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2025
Filed:
Mar. 31, 2022
Changchun Institute of Optics, Fine Mechanics and Physics, Academy of Sciences, Changchun, CN;
Wenhao Li, Changchun, CN;
Zhaowu Liu, Changchun, CN;
Hongzhu Yu, Changchun, CN;
Wei Wang, Changchun, CN;
Rigalantu Ji, Changchun, CN;
Xuefeng Yao, Changchun, CN;
Abstract
A heterodyne two-dimensional grating measuring device and measuring method thereof includes a light source, a reading head, a photoelectric receiving module, and a processor. The light source is configured to generate two beams of linearly polarized light having characteristics of overlapping, polarization orthogonal, and fixed frequency difference. The reading head is configured to receive the two beams of the linearly polarized light, the two beams of the linearly polarized light are respectively incident on a surface of a moving two-dimensional measuring grating to generate ±1-order diffracted lights of two dimensions, and the ±1-order diffracted lights are respectively incident to the photoelectric receiving module through the reading head. The photoelectric receiving module is configured to generate beat frequency signals, the processor is configured to perform differential calculation on the beat frequency signals to realize a displacement measurement of measuring grating for four-fold optical subdivision.