The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2024
Filed:
Jun. 26, 2023
Applicant:
Unity Semiconductor, Montbonnot-Saint-Martin, FR;
Inventors:
Mayeul Durand de Gevigney, Montbonnot-Saint-Martin, FR;
Guillaume Vienne, Corenc, FR;
Kaiss Benhadjsalem, Sassenage, FR;
Assignee:
Unity Semiconductor, Montbonnot-Saint-Martin, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/95 (2006.01); G01N 21/88 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9501 (2013.01); G01N 21/8806 (2013.01); G01N 2021/8845 (2013.01); G01N 2201/0846 (2013.01);
Abstract
A system for optical inspection of a substrate. The system comprises an illumination device defining an inspection area on the substrate, a support to receive the substrate, and a detection device defining a detection area on the substrate. The inspection area is positioned ahead, with respect to the scanning direction, of at least a portion of the detection area.