logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12119129 B1

PDFFull Text
Date of Patent:
Oct. 15, 2024

Filed:

Mar. 13, 2023

Euv lithography apparatus

Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Cheng Hung Tsai, Hsinchu, TW;

Sheng-Kang Yu, Hsinchu, TW;

Shang-Chieh Chien, New Taipei, TW;

Heng-Hsin Liu, New Taipei, TW;

Li-Jui Chen, Hsinchu, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;

Attorney:

STUDEBAKER & BRACKETT PC

Primary Examiner:

Nicole M Ippolito

Assistant Examiner:

Hanway Chang

Int. Cl.
CPC ...
G21K 1/06 (2006.01); G02B 5/08 (2006.01); G03F 7/00 (2006.01); H05G 2/00 (2006.01);
U.S. Cl.
CPC ...
G21K 1/06 (2013.01); G02B 5/0891 (2013.01); G03F 7/70033 (2013.01); G03F 7/702 (2013.01); G03F 7/7055 (2013.01); G03F 7/70916 (2013.01); H05G 2/005 (2013.01); H05G 2/008 (2013.01);
Abstract

An extreme ultra violet (EUV) light source apparatus includes a metal droplet generator, a collector mirror, an excitation laser inlet port for receiving an excitation laser, a first mirror configured to reflect the excitation laser that passes through a zone of excitation, and a second mirror configured to reflect the excitation laser reflected by the first mirror.

Find Patent Forward Citations

Tsai, Cheng. (2024). Euv lithography apparatus (U.S. Patent No. 12119129). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12119129

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…