The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2024
Filed:
Sep. 17, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Borui Xia, San Jose, CA (US);
Anthony Chih-Tung Chan, Sunnyvale, CA (US);
Shiyu Yue, Sunnyvale, CA (US);
Wei Lei, Campbell, CA (US);
Aravind Miyar Kamath, San Jose, CA (US);
Mukund Sundararajan, Bangalore, IN;
Rongjun Wang, Dublin, CA (US);
Adolph Miller Allen, Oakland, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Magnet assemblies comprising a housing with a top plate each comprising aligned openings are described. The housing has a bottom ring and an annular wall with a plurality of openings formed in the bottom ring. The top plate is on the housing and has a plurality of openings aligned with the plurality of openings in the bottom ring of the housing. The magnet assembly may also include a non-conducting base plate and/or a conductive cover plate. Methods for using the magnet assembly and magnetic field tuning are also described.