The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2024
Filed:
Nov. 15, 2021
Tokyo Electron Limited, Tokyo, JP;
Hiroki Hosaka, Yamanashi, JP;
Hiroshi Amemiya, Yamanashi, JP;
Fumito Kagami, Yamanashi, JP;
Tadashi Obikane, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Techniques for testing both a rectangular substrate and a circular substrate are provided. One aspect of the present disclosure pertains to a test device comprising an exchangeable change kit, wherein the change kit comprises a first holding device and a second holding device which are exchangeably mounted in the test device, wherein the first holding device is configured to adsorb and hold a rectangular substrate, wherein the second holding device is configured to adsorb and hold a circular substrate, and wherein the first holding device and the second holding device are exchanged according to a substrate to be tested.