The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 24, 2024

Filed:

Mar. 03, 2020
Applicants:

Vg Systems Limited, Altrincham, GB;

Fei Company, Hillsboro, OR (US);

Inventors:

Austin Penrose Day, Clearwell, GB;

Christopher James Stephens, West Sussex, GB;

Pavel Stejskal, Brno, CZ;

Martin Petrek, Brno, CZ;

Assignees:

FEI Company, Hillsboro, OR (US);

VG Systems Limited, Chesire, GB;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 23/203 (2006.01);
U.S. Cl.
CPC ...
G01N 23/203 (2013.01); G01N 2223/0566 (2013.01); G01N 2223/40 (2013.01);
Abstract

A method of analyzing a sample imaged by electron backscatter diffraction. The method comprises identifying a plurality of Kikuchi bands in an electron backscatter diffraction image of a position on the sample. The method further comprises forming, for each identified Kikuchi band, a respective vector representation of said Kikuchi band based at least in part on an estimate of the position on the sample. A configuration of the sample is determined by identifying a particular set of expected vector representations from a plurality of sets of expected vector representations as matching the vector representations of the plurality of identified Kikuchi bands.


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