The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2024
Filed:
Nov. 27, 2019
Applicant:
Aixtron SE, Herzogenrath, DE;
Inventors:
Marcel Kollberg, Würselen, DE;
Francisco Ruda Y Witt, Eschweiler, DE;
Assignee:
AIXTRON SE, Herzogenrath, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); B23K 26/364 (2014.01); B23K 26/382 (2014.01); B23K 26/402 (2014.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45508 (2013.01); B23K 26/364 (2015.10); B23K 26/389 (2015.10); B23K 26/402 (2013.01); B23K 2103/52 (2018.08); B23K 2103/54 (2018.08);
Abstract
A component made of a quartz blank is used as a component part of a CVD reactor. At least one cavity of the component is created by selective laser etching, wherein a fluid flows through the at least one cavity. When in use, the component is heated to temperatures in excess of 500° C., and comes into contact with hydrides of the main groups IV, V or VI and/or with organometallic compounds or halogenides of elements of the main groups II, III or V.