The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2024
Filed:
Sep. 15, 2021
International Business Machines Corporation, Armonk, NY (US);
Tao Li, Slingerlands, NY (US);
Ruilong Xie, Niskayuna, NY (US);
Tsung-Sheng Kang, Ballston Lake, NY (US);
Alexander Reznicek, Troy, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Interconnect structures having top vias self-aligned to metal line ends and techniques for formation thereof are provided. In one aspect, an interconnect structure includes: at least one metal line disposed on a substrate; at least one top via over the at least one metal line, wherein the at least one top via is aligned with an end of the at least one metal line, and wherein a sidewall of the at least one top via is curved. A dielectric fill material can be disposed adjacent to the at least one top via having sidewalls that are also curved. A method of fabricating an interconnect structure is also provided.