The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2024
Filed:
Nov. 28, 2022
Yangtze Memory Technologies Co., Ltd., Wuhan, CN;
YANGTZE MEMORY TECHNOLOGIES CO., LTD., Wuhan, CN;
Abstract
Embodiments of 3D memory devices are disclosed. In an example, a 3D memory device includes a memory stack, a structure penetrating the memory stack; a dielectric stack on the memory stack, and a contact structure penetrating the dielectric stack and being in contact with the structure. The dielectric stack comprises a first dielectric layer and a second dielectric layer having a first dielectric material, and an intermedia dielectric layer sandwiched by the first dielectric layer and the second dielectric layer, and having a second dielectric material different from the first dielectric material. The contact structure comprises a lower contact portion penetrating the first dielectric layer and the intermedia dielectric layer, the lower contact portion having a first lateral dimension, and an upper contact portion penetrating the second dielectric layer, the upper contact portion having a second lateral dimension less than the first lateral dimension.