The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2024
Filed:
Feb. 20, 2019
Kokusai Electric Corporation, Tokyo, JP;
Koei Kuribayashi, Toyama, JP;
Kenji Kameda, Toyama, JP;
Tsukasa Kamakura, Toyama, JP;
Takeo Hanashima, Toyama, JP;
Hiroaki Hiramatsu, Toyama, JP;
Shinya Ebata, Toyama, JP;
Hiroto Yamagishi, Toyama, JP;
Sadao Hisakado, Toyama, JP;
Takafumi Sasaki, Toyama, JP;
Takatomo Yamaguchi, Toyama, JP;
Shuhei Saido, Toyama, JP;
KOKUSAI ELECTRIC CORPORATION, Tokyo, JP;
Abstract
There is provided a technique that cleans a member in a process container by performing a cycle a predetermined number of times, the cycle including: (a) separately supplying a cleaning gas and an additive gas that reacts with the cleaning gas, respectively, from any two supply parts among at least three supply parts into the process container after processing a substrate; and (b) separately supplying the cleaning gas and the additive gas, respectively, from any two supply parts among the at least three supply parts into the process container, wherein at least one selected from the group of the cleaning gas and the additive gas is supplied from different supply parts in (a) and (b).