The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2024
Filed:
Oct. 30, 2019
Asml Netherlands B.v., Veldhoven, NL;
Abraham Slachter, Waalre, NL;
Wim Tjibbo Tel, Helmond, NL;
Daan Maurits Slotboom, Wolphaartsdijk, NL;
Vadim Yourievich Timoshkov, Veldhoven, NL;
Koen Wilhelmus Cornelis Adrianus Van Der Straten, Oud Gastel, NL;
Boris Menchtchikov, Redwood City, CA (US);
Simon Philip Spencer Hastings, San Jose, CA (US);
Cyrus Emil Tabery, San Jose, CA (US);
Maxime Philippe Frederic Genin, San Mateo, CA (US);
Youping Zhang, Cupertino, CA (US);
Yi Zou, Foster City, CA (US);
Chenxi Lin, Newark, CA (US);
Yana Cheng, San Jose, CA (US);
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A method for analyzing a process, the method including obtaining a multi-dimensional probability density function representing an expected distribution of values for a plurality of process parameters; obtaining a performance function relating values of the process parameters to a performance metric of the process; and using the performance function to map the probability density function to a performance probability function having the process parameters as arguments.