The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2024

Filed:

May. 06, 2021
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Eungnak Han, Portland, OR (US);

Gurpreet Singh, Portland, OR (US);

Tayseer Mahdi, Hillsboro, OR (US);

Florian Gstrein, Portland, OR (US);

Lauren Doyle, Portland, OR (US);

Marie Krysak, Portland, OR (US);

James Blackwell, Portland, OR (US);

Robert Bristol, Portland, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08F 265/04 (2006.01); C08F 265/02 (2006.01); G03F 7/11 (2006.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01);
U.S. Cl.
CPC ...
C08F 265/04 (2013.01); C08F 265/02 (2013.01); G03F 7/11 (2013.01); H01L 23/5226 (2013.01); H01L 23/528 (2013.01);
Abstract

A chemical composition includes a polymer chain having a surface anchoring group at a terminus of the polymer chain. The surface anchoring group is metal or dielectric selective and the polymer chain further includes at least one of a photo-acid generator, quencher, or a catalyst. In some embodiments, the surface anchoring group is metal selective or dielectric selective. In some embodiments, the polymer chain includes side polymer chains where the side polymer chains include polymers of photo-acid generators, quencher, or catalyst.


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