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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12027407 B1

PDFFull Text
Date of Patent:
Jul. 02, 2024

Filed:

Oct. 03, 2017

Substrate support apparatus and method

Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Yueh Lin Yang, Hsinchu, TW;

Chi-Hung Liao, Sanchong, TW;

Fei-Gwo Tsai, Taipei, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;

Attorney:

Hauptman Ham, LLP

Primary Examiner:

Jeffrie R Lund

Assistant Examiner:

Tiffany Z Nuckols

Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 14/50 (2006.01); C23C 16/458 (2006.01); H01L 21/673 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01); H05K 7/14 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6838 (2013.01); C23C 14/505 (2013.01); C23C 16/4586 (2013.01); H01L 21/673 (2013.01); H01L 21/6734 (2013.01); H01L 21/6835 (2013.01); H01L 21/687 (2013.01); H01L 21/6875 (2013.01); H05K 7/14 (2013.01);
Abstract

A substrate support apparatus includes a housing and a plurality of spherical supports. The housing has a top surface, the top surface including a plurality of openings. The housing is configured to position the plurality of spherical supports within the plurality of openings so that topmost surfaces of the plurality of spherical supports are arranged in a plane above the top surface. A spherical support of the plurality of spherical supports is rotatable within the housing.

Find Patent Forward Citations

Yang, Yueh. (2024). Substrate support apparatus and method (U.S. Patent No. 12027407). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12027407

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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