Electromigration evaluation methodology with consideration of thermal and signal effects

Abstract

A system for evaluating a heat sensitive structure of an integrated circuit design including a memory for retrieving and storing integrated circuit design layout data, thermal data, process data, and one or more operational parameters, a processor capable of accessing the memory and identifying a target region having a nominal temperature T, first and second heat generating structures within a first impact range of the target region, calculating the temperature increases ΔTand ΔTin the target region as a result of thermal coupling between the target region and the first and second heat generating structures, and conducting one or more parametric evaluations of the target region at an adjusted evaluation temperature T=T+ΔT+ΔTafter which a network interface transmits the result(s) of the parametric evaluation(s) for use in a design review.