The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2024
Filed:
Apr. 14, 2022
Tokyo Electron Limited, Tokyo, JP;
Mark I. Gardner, Cedar Creek, TX (US);
Robert D. Clark, Livermore, CA (US);
H. Jim Fulford, Marianna, FL (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
A semiconductor device includes a substrate having a substrate surface, a transistor stack provided on the substrate surface and including a plurality of transistors stacked on each other along a vertical direction that is perpendicular to the substrate surface. Each transistor in the transistor stack includes a vertical channel structure extending along the vertical direction and having a first vertical sidewall and a second vertical sidewall opposite to the first vertical sidewall, and a ferroelectric gate structure in contact with the first vertical sidewall of the vertical channel structure; and a back gate structure provided on the substrate and in contact with the second vertical sidewall of the vertical channel structure of each respective transistor in the transistor stack.