The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2024
Filed:
Jun. 10, 2021
Asml Netherlands B.v., Veldhoven, NL;
Christiaan Otten, IJsselstein, NL;
Peter-Paul Crans, Poeldijk, NL;
Marc Smits, Pijnacker, NL;
Laura Del Tin, The Hague, NL;
Christan Teunissen, Delft, NL;
Yang-Shan Huang, Veldhoven, NL;
Stijn Wilem Herman Karel Steenbrink, The Hague, NL;
Xuerang Hu, San Jose, CA (US);
Qingpo Xi, Fremont, CA (US);
Xinan Luo, San Jose, CA (US);
Xuedong Liu, San Jose, CA (US);
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Disclosed herein is a module for supporting a device configured to manipulate charged particle paths in a charged particle apparatus, the module comprising: a support arrangement configured to support the device, wherein the device is configured to manipulate a charged particle path within the charged particle apparatus; and a support positioning system configured to move the support arrangement within the module; wherein the module is arranged to be field replaceable in the charged particle apparatus.