The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 09, 2024

Filed:

Mar. 28, 2022
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Jian-Hong Lin, Yunlin County, TW;

Kuo-Yen Liu, Hsinchu County, TW;

Hsin-Chun Chang, Taipei, TW;

Tzu-Li Lee, Yunlin County, TW;

Yu-Ching Lee, Kaohsiung, TW;

Yih-Ching Wang, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 23/522 (2006.01); H01L 23/58 (2006.01); H01L 27/02 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 23/562 (2013.01); H01L 23/522 (2013.01); H01L 23/5226 (2013.01); H01L 23/585 (2013.01); H01L 27/0248 (2013.01); H01L 21/76805 (2013.01); H01L 2224/06519 (2013.01); H01L 2224/09519 (2013.01); H01L 2224/30519 (2013.01); H01L 2224/33519 (2013.01);
Abstract

An interconnect structure comprises a first dielectric layer, a first metal layer, a second dielectric layer, a metal via, and a second metal layer. The first dielectric layer is over a substrate. The first metal layer is over the first dielectric layer. The first metal layer comprises a first portion and a second portion spaced apart from the first portion. The second dielectric layer is over the first metal layer. The metal via has an upper portion in the second dielectric layer, a middle portion between the first and second portions of the first metal layer, and a lower portion in the first dielectric layer. The second metal layer is over the metal via. From a top view the second metal layer comprises a metal line having longitudinal sides respectively set back from opposite sides of the first portion of the first metal layer.


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