The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2024
Filed:
Dec. 27, 2021
Asml Netherlands B.v., Veldhoven, NL;
Nitesh Pandey, Eindhoven, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Duygu Akbulut, Eindhoven, NL;
Marinus Johannes Maria Van Dam, Venlo, NL;
Hans Butler, Best, NL;
Hugo Augustinus Joseph Cramer, Eindhoven, NL;
Engelbertus Antonius Fransiscus Van Der Pasch, Oirschot, NL;
Ferry Zijp, Nuenen, NL;
Jeroen Arnoldus Leonardus Johannes Raaymakers, Veldhoven, NL;
Marinus Petrus Reijnders, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A metrology tool for determining a parameter of interest of a structure fabricated on a substrate, the metrology tool comprising: an illumination optical system for illuminating the structure with illumination radiation under a non-zero angle of incidence; a detection optical system comprising a detection optical sensor and at least one lens for capturing a portion of illumination radiation scattered by the structure and transmitting the captured radiation towards the detection optical sensor, wherein the illumination optical system and the detection optical system do not share an optical element.