The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2024
Filed:
Nov. 27, 2018
Asml Netherlands B.v., Veldhoven, NL;
Asml Holding N.v., Veldhoven, NL;
Derk Servatius Gertruda Brouns, Herentals, BE;
Joshua Adams, Wilton, CT (US);
Aage Bendiksen, Fairfield, CT (US);
Richard Jacobs, Brookfield, CT (US);
Andrew Judge, Monroe, CT (US);
Veera Venkata Narasimha Narendra Phani Kottapalli, Fairfield, CT (US);
Joseph Harry Lyons, Wilton, CT (US);
Theodorus Marinus Modderman, Nuenen, NL;
Manish Ranjan, Eindhoven, NL;
Marcus Adrianus Van De Kerkhof, Helmond, NL;
Xugang Xiong, Westport, CT (US);
ASML NETHERLANDS B.V., Veldhoven, NL;
ASML HOLDING N.V., Veldhoven, NL;
Abstract
An apparatus for determining a condition associated with a pellicle for use in a lithographic apparatus, the apparatus including a sensor, wherein the sensor is configured to measure a property associated with the pellicle, the property being indicative of the pellicle condition.