The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2024
Filed:
Feb. 17, 2021
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Yasuyuki Masuda, Tokyo, JP;
Shao Hua Chang, Tokyo, JP;
Yoshitaka Mukaiyama, Tokyo, JP;
Masashi Shimoyama, Tokyo, JP;
Jumpei Fujikata, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 17/02 (2006.01); C25D 21/10 (2006.01); B33Y 80/00 (2015.01); B33Y 50/02 (2015.01); B33Y 10/00 (2015.01);
U.S. Cl.
CPC ...
C25D 21/10 (2013.01); B33Y 10/00 (2014.12); B33Y 50/02 (2014.12); B33Y 80/00 (2014.12); C25D 17/02 (2013.01);
Abstract
A paddle capable of reducing an influence of blocking the electric field and capable of improving its mechanical strength is disclosed. The paddle, which is configured to agitate a processing liquid in a processing tank by moving in the processing tank, includes a plurality of agitating beams that form a honeycomb structure. The honeycomb structure has a plurality of hexagonal through-holes formed by the plurality of agitating beams.