The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2024
Filed:
Oct. 18, 2019
Semes Co., Ltd., Cheonan-si, KR;
Jae Seong Lee, Hwaseong-si, KR;
Hae Won Choi, Daejeon, KR;
Ki Hoon Choi, Yongin-si, KR;
Anton Koriakin, Cheonan-si, KR;
Chan Young Heo, Hwaseong-si, KR;
Do Heon Kim, Cheonan-si, KR;
Ji Soo Jeon, Seoul, KR;
SEMES CO., LTD., Cheonan-si, KR;
Abstract
A supercritical processing apparatus includes an upper vessel including a first fluid hole formed in a center thereof, and a lower vessel including a second fluid hole formed in a center thereof. A space is defined between the upper and lower vessels and configured to allow a substrate to be placed therein. The upper vessel further includes a first guide portion provided at a lower portion thereof to be gradually inclined downward toward a periphery thereof from the first fluid hole.