The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2024
Filed:
Jul. 27, 2021
Applicant:
Globalfoundries U.s. Inc., Malta, NY (US);
Inventors:
Johnatan A. Kantarovsky, South Burlington, VT (US);
Mark D. Levy, Williston, VT (US);
Brett T. Cucci, Colchester, VT (US);
Jeonghyun Hwang, Ithaca, NY (US);
Siva P. Adusumilli, South Burlington, VT (US);
Assignee:
GLOBALFOUNDRIES U.S. INC., Malta, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 29/778 (2006.01); H01L 29/66 (2006.01); H01L 21/8234 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0649 (2013.01); H01L 21/823481 (2013.01); H01L 29/66431 (2013.01); H01L 29/7786 (2013.01);
Abstract
The present disclosure relates to semiconductor structures and, more particularly, to gate structures and methods of manufacture. The structure includes: a gate structure comprising a horizontal portion and a substantially vertical stem portion; and an air gap surrounding the substantially vertical stem portion and having a curved surface under the horizontal portion.